FABRICATION OF HIGH-ASPECT-RATIO NANOPOROUS HIGH-K MTIO3 (M=BA, SR, OR BAXSR1-X) USING ANODIZATION AND HYDROTHERMAL PROCESSES
Sheng-Po Fang, Kyoung-Tae Kim, Todd Schumann and Yong-Kyu Yoon
Fabrication of a nanoporous high-k material is demonstrated using anodization and hydrothermal processes. The fabrication process offers advantages of the formation of a high-aspect-ratio large surface area nanoporous structure, low temperature conformal surface conversion, and the creation of high dielectric constant perovskite ferroelectrics. The hydrothermal process is exploited to form various MTiO3materials such as BaTiO3, SrTiO3, and BaxSr1-xTiO3with different Ba and Sr ratios. The crystalline phase, morphology, and element composition of the nanostructured material are investigated by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), transmission electron microscopy (TEM) and energy dispersive X-ray spectroscope (EDX), to prove the formation of ordered polycrystalline MTiO3arrays. The three dimensional high density capacitor would be realized by this fabrication method.
Keywords: High-k material, Anodization, Hydrothermal and Lowtemperature