MICROMACHINED ANGLE RESOLVED 3HE QUASI-PARTICLE DETECTOR
Yoonseok Lee, Colin Barquist, Pan Zheng, Wenguang G Jiang, Todd Schumann and Yong-Kyu Yoon
Micromachined comb-drive mechanical resonators have been developed for the study of quantum fluids. Our study in 3He-B showed that the temperature dependence of the damping in this device was consistent with a damping model derived from thermal quasi-particles and demonstrated its potential as a sensitive quasi-particle flux detector. It is natural to conceive a scheme to build angle-resolved or space-momentum resolved 3He quasi-particle detectors in the form of array of resonators. This type of detectors could play an important role in revealing detailed structure of excitations or visualizing vortices in quantum fluids. A prototype detector is composed of 4 × 4 or 6 × 6 array of comb-drive resonators with strategically dispersed resonance frequencies. In this paper, We will discuss the working principle and design of the detector array.
Keywords: Micromachining, quantum fluids, MEMS, quasi-particle flux detector and comb-drive resonators