FABRICATION OF SELF-PACKAGED SEAMLESS NANOPOROUS SU-8 MICROCHANNELS
Sheng-Po Fang, Pit Fee Jao, Kun Cho, Jung Hae Yoon, Kyoung-Tae Kim and Yong-Kyu Yoon
Fabrication of a self-packaged partial semicircular nanoporous microchannel is demonstrated using electrospinning, self-limiting ultraviolet lithography, and thermal-reHow packaging processes with SU-8. The fabrication process offers unique advantages of microresolution channel patterning, alignment free seamless integration of nanofibers in a microchannel by self-packaged reHow, and easy formation of 3-D nanoporous channels. A fabricated nanoporous microchannel with a channel length of 7 mm, a channel width of 73.85 μm, and a channel height of 34.65 μm shows slow Huidic How through the channel, functioning as an effective nanochannel with an equivalent channel height of 800 nm and a radius of 857 nm, and therefore, its reduction ratios of the channel height and radius are ~97.7% and 97.8%, respectively.
Keywords: Microchannels, Nanoscale devices, Lithography, Optical device fabrication and SU-8 microchannels