FABRICATION OF MULTIPLE HEIGHT MICROPROBES USING UV LITHOGRAPHY ON TIMED-DEVELOPMENT-AND-THERMAL-REFLOWED PHOTORESIST
Jungkwun Kim, Hyochun Ahn, Xiaoyu Cheng, Kyoung Tae Kim, Gwan Ha Kim and Yong-Kyu Yoon
No abstract available
Keywords: none
No abstract available
Keywords: none