FABRICATION OF HIGH ENERGY DENSITY CAPACITORS WITH MICROMACHINED CARBON NANOFIBER ELECTRODES
Gloria Kim, Gwan-Ha Kim and Yong-Kyu Yoon
A three-step fabrication process has been implemented to generate carbon nanofiber electrodes. The method utilizes electrospinning of negative tone photopatternable epoxy SU-8, lithographical patterning, and carbonization. Taking advantage of their high surface area-to-volume ratio, low resistivity, and chemical stability, the carbon nanofibers have been applied as electrodes to fabricate high energy density capacitors. A capacitance of 1.782 nF/mm2 using 45 nm SiO2 as a dielectric layer has been obtained. Successful device implementation and enhanced performance suggest that these carbon nanofiber electrodes also hold promise in extended applications as microbattery anodes and sensor electrodes.
Keywords: electrospun nanofibers, photopatterning, carbon electrodes and high energy density capacitor